Publication | Closed Access
Nanometer-level high-accuracy molding using a photo-curable silicone elastomer by suppressing thermal shrinkage
22
Citations
19
References
2014
Year
Materials ScienceNanometer-level High-accuracy MoldingEngineeringMicrofabricationPhoto-curable Silicone ElastomerPolymer ScienceMechanical EngineeringThermal ShrinkagePolymer ProcessingNanostructured PolymerFabrication TechniqueHigh Replication AccuracyPhotopolymer NetworkPhotocured ElastomerBiophysics3D PrintingMolding (Process)Nanolithography Method
The photocured elastomer presented here provided extremely high replication accuracy due to its thermal shrinkage of less than 0.02%, compared to 2.91% in the heat-cured elastomer.
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