Micromachined gyroscopes

Silicon monolithic micromechanical gyroscope

Paul Greiff, Burton Boxenhorn, Tsu‐Jae King et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 142 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Piezoelectric beams and vibrating angular rate sensors

Jan Söderkvist · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1991 · 66 citations

Engineering, Mechanical Engineering, Instrumentation +15

Surface Micromachined Accelerometer: A Technology Update

Richard Payne, Kristin A. Dinsmore · SAE technical papers on CD-ROM/SAE technical paper series · 1991 · 35 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

Piezoelectric vibratory gyroscope using flexural vibration of a triangular bar

S. Fujishima, Tomoya Nakamura, K. Fujimoto · 2002 · 27 citations

Engineering, Automotive Engineering, Mechanical Engineering +16

Flexural vibrations in piezoelectric semi-insulating GaAs

Jan Söderkvist, Klas Hjort · Sensors and Actuators A Physical · 1993 · 16 citations

Natural Sciences, Electrical Engineering, Materials Science +13