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Silicon Nanotubes
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2002
Year
Materials ScienceElectrical EngineeringSilicon NanotubesEngineeringNanomaterialsNanoelectronicsNanotechnologyApplied PhysicsNanochannel Al2o3Conceptual ModelNanostructure SynthesisNanofabricationNanostructured MaterialsChemical Vapor DepositionNanostructures
The preparation of silicon nanotubes (SiNTs) using nanochannel Al2O3 as a template and a chemical vapor deposition process is reported. The outer diameters of the SiNTs are around 60 nm with walls approximately 10 nm thick consisting of crystalline and amorphous silicon. A conceptual model is presented (see Figure) to account for the formation of SiNTs (right) as opposed to nanowires (left).