Performance of thin film silicon MEMS on flexible plastic substrates - Concepedia

Concepedia

Publication | Closed Access

Performance of thin film silicon MEMS on flexible plastic substrates

28

Citations

14

References

2008

Year

Samadhan B. Patil, V. Chu, J. P. Conde

Sensors and Actuators A Physical

Materials ScienceEngineeringFlexible ElectronicsMicrofabricationFlexible Plastic SubstratesApplied PhysicsNano Electro Mechanical SystemThin FilmsElectronic PackagingMicrofluidicsSilicon On InsulatorMicro-electromechanical SystemMicroelectronics

References

	Year	Citations

Page 1