Concepedia

Publication | Open Access

Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams

DOIFull Paper Access

32

Citations

30

References

2022

Year

E. I. Mareev, A. V. Pushkin, E. A. Migal, K. V. Lvov, S. Yu. Stremoukhov, F. V. Potemkin
Scientific Reports

References

YearCitations

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