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Triboelectric nanogenerator based on direct image lithography and surface fluorination for biomechanical energy harvesting and self-powered sterilization

Direct Image LithographyMiniaturizationEnergy HarvestingEngineeringMicrofabricationEnergy ConversionNanotechnologyPiezoelectric NanogeneratorsNano Electro Mechanical SystemBiomedical EngineeringTriboelectric NanogeneratorSurface Fluorination