Publication | Closed Access

Synergic strategies of composition-modified bilayer channel configuration and ozone-processed gate stacks for atomic-layer deposited In-Ga-Zn-O thin-film transistors

Electrical EngineeringEngineeringApplied PhysicsSynergic StrategiesMolecular Beam EpitaxyMicroelectronicsOzone-processed Gate StacksSemiconductor Device