Publication | Open Access
Localization and Mitigation of Loss in Niobium Superconducting Circuits
100
Citations
54
References
2022
Year
Superconducting MaterialEngineeringResonator Coherent LifetimeSilicon On InsulatorSuperconductivityPhotonic Integrated CircuitElectronic PackagingSuperconducting DevicesMaterials ScienceMaterials EngineeringElectrical EngineeringNiobium Superconducting CircuitsPhysicsOther Resonator LossesSemiconductor Device FabricationMicroelectronicsPlasma EtchingCondensed Matter PhysicsApplied PhysicsSelective Post-fabrication EtchingOptoelectronics
Using selective post-fabrication etching, different ratios of TLS and other resonator losses are associated with the silicon and niobium surface oxides, while the resonator coherent lifetime is increased by a factor of five.
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