Atomic tailoring of low-thermal-budget and nearly wake-up-free ferroelectric Hf0.5Zr0.5O2 nanoscale thin films by atomic layer annealing - Concepedia

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Atomic tailoring of low-thermal-budget and nearly wake-up-free ferroelectric Hf0.5Zr0.5O2 nanoscale thin films by atomic layer annealing

26

Citations

56

References

2022

Year

Teng-Jan Chang, Yu‐Sen Jiang, Sheng‐Han Yi, Chun-Yi Chou, Chin-I Wang, Hsin-Chih Lin, Miin‐Jang Chen

Applied Surface Science

Materials ScienceEngineeringFerroelectric ApplicationNanotechnologyNanoelectronicsOxide ElectronicsApplied PhysicsAtomic TailoringThin FilmsAtomic Layer

References

	Year	Citations

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