Core Level XPS Spectra of Silicon Carbide Using Zirconium and Magnesium Radiations

Abstract

Core levels of silicon and carbon in the hexagonal form of silicon carbide have been studied by x-ray photoelectron spectroscopy. For this purpose, zirconium Lα (energy = 2042.4 eV) and magnesium Kα (energy = 1253.6 eV) radiations have been employed. The XPS data in the silicon 1s, 2s, 2p, and Auger KLL, and carbon 1s and Auger KLL regions are presented. The data set will serve as a source of valuable information for analyzing spectra associated with silicon and carbon in the insulating sample of silicon carbide.