Concepedia

Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application

Xiaoying Zhang, Yue Yang, Wei‐Hang Fan, Chen Wang, Wan-Yu Wu, Ming-Chun Tseng, Dong‐Sing Wuu, Peng Gao, Hao‐Chung Kuo, Shui‐Yang Lien,

Surface and Coatings Technology · 2022 · 36 citations · 48 references

DOI

Concepts

References

48

Optical properties and electronic structure of amorphous Ge and Si

J. Tauc · Materials Research Bulletin · 1968 · 3.5K citations

, , +16

Deep-ultraviolet transparent conductive β-Ga2O3 thin films

Masahiro Orita, Hiromichi Ohta, Masahiro Hirano et al. · Applied Physics Letters · 2000 · 996 citations

, , +17

Electrical conductivity and carrier concentration control in β-Ga2O3 by Si doping

Encarnación G. Vı́llora, Kiyoshi Shimamura, Yukio Yoshikawa et al. · Applied Physics Letters · 2008 · 442 citations

, , +17

Effects of oxygen vacancies on the structural and optical properties of β-Ga2O3

Linpeng Dong, Renxu Jia, Bin Xin et al. · Scientific Reports · 2017 · 339 citations · Full text

, , +17

Si-Ion Implantation Doping in β-Ga<sub>2</sub>O<sub>3</sub>and Its Application to Fabrication of Low-Resistance Ohmic Contacts

Kohei Sasaki, Masataka Higashiwaki, Akito Kuramata et al. · Applied Physics Express · 2013 · 328 citations

, , +17