Scaled indium oxide transistors fabricated using atomic layer deposition - Concepedia

Concepedia

Publication | Open Access

Scaled indium oxide transistors fabricated using atomic layer deposition

DOI Full Paper Access

262

Citations

30

References

2022

Year

Mengwei Si, Zehao Lin, Zhizhong Chen, Xing Sun, Haiyan Wang, Peide D. Ye

Nature Electronics

Electrical EngineeringSemiconductor DeviceEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsSemiconductor Device FabricationMicroelectronicsScaled Indium

References

	Year	Citations

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