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Effect of oxygen flow rate ratio on crystalline phase and properties of copper oxide films prepared by room-temperature high-power impulse magnetron sputtering

Materials ScienceMagnetismMaterials EngineeringCopper Oxide MaterialsEngineeringMaterial AnalysisCrystalline PhaseOxide ElectronicsSurface ScienceApplied PhysicsChemical DepositionThin Film Processing