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Effects of trivalent lanthanide (La and Nd) doped ceria abrasives on chemical mechanical polishing

Materials ScienceMaterials EngineeringChemical EngineeringTrivalent LanthanideEngineeringMaterial ProcessingCorrosionSurface ScienceCeria AbrasivesCermetSurface TreatmentChemistryChemical Mechanical PolishingAbrasive MachiningAbrasive Process