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Effect of working pressure on Sn/In composition and optoelectronic properties of ITO films prepared by high power impulse magnetron sputtering

Materials ScienceMaterials EngineeringElectrical EngineeringSn/in CompositionEngineeringOptical PropertiesOptoelectronic PropertiesOptoelectronic MaterialsApplied PhysicsIto FilmsThin Film Process TechnologyThin FilmsOptoelectronicsThin Film Processing