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Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering

Materials ScienceMaterials EngineeringBoron NitrideBias VoltagesEngineeringThermal Barrier CoatingApplied PhysicsRf MagnetronMultiprincipal Element AlloyMicrostructure