3D-printed silica with nanoscale resolution

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

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Three-dimensional printing of transparent fused silica glass

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Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

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Ultra-Low Shrinkage Hybrid Photosensitive Material for Two-Photon Polymerization Microfabrication

Aleksandr Ovsianikov, Jacques Viertl, Boris N. Chichkov et al. · ACS Nano · 2008 · 517 citations

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