Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size - Concepedia

Concepedia

Publication | Open Access

Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

DOI Full Paper Access

538

Citations

18

References

2013

Year

Zongsong Gan, Yaoyu Cao, Richard A. Evans, Miṅ Gu

Nature Communications

References

	Year	Citations

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