A 1.2-Mpixel Indirect Time-of-Flight Image Sensor With 4-Tap 3.5-<i>μ</i>m Pixels for Peak Current Mitigation and Multi-User Interference Cancellation

Abstract

A 1.2-Mpixel indirect time-of-flight (ToF) CMOS image sensor is presented to lower peak current and to cancel out multi-user interference. The proposed 4-tap 3.5- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> demodulation pixel is optimally designed to improve quantum efficiency (QE) and demodulation contrast (DC). A new “multiple-interleaving” scheme is proposed to reduce the peak current and self-compensate fixed-pattern phase noise (FPPN) with the minimal side effect of DC imbalance. To cancel out interference from the other ToF sensors, a multi-user interference cancellation (MUIC) scheme based on pseudorandom modulation is adopted. From the measurement results, we achieve a high QE of 38% at 940 nm and a high DC of 96% and 80% at 100- and 200-MHz modulation frequencies, respectively. With the superior pixel performance, the depth noise of <0.92% and <0.3% is achieved at the full and 2 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> 2 binning modes, respectively. The multiple-interleaving scheme suppresses the peak current to less than 0.9 A and removes the column FPPN with constant DC for the whole pixel array. The proposed MUIC proves that at least two interferers can be successfully rejected. The sensor chip is fabricated in a two-stack process with 65 nm for the top die and 65 nm for the bottom die.