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A High-Sensitive Fiber-Optic Fabry-Perot Sensor With Parallel Polymer-Air Cavities Based on Vernier Effect for Simultaneous Measurement of Pressure and Temperature
77
Citations
28
References
2021
Year
PhotonicsPhotonic SensorOptical MaterialsEngineeringMicrofabricationOptical PropertiesPressure SensitivityFiber Optic SensingSensor DesignFiber OpticsInstrumentationVernier EffectSimultaneous MeasurementOptical SensorParallel Polymer-air CavitiesOptical SensorsPlanar Waveguide SensorFiber Optic
A novel high-sensitive fiber-optic Fabry-Perot sensor with parallel polymer-air cavities based on Vernier effect was proposed and demonstrated for simultaneous measurement of pressure and temperature. The sensor is composed of two parallel Fabry-Perot cavities both are fabricated by splicing a section of silica tube to the single-mode fiber. One cavity is filled with polydimethylsiloxane, and the other cavity is filled with a thin layer of ultraviolet glue at the end-face of silica tube, ensuring that the free spectrum ranges of two Fabry-Perot cavities are similar and generate the Vernier effect. The Fabry-Perot interferometer filled with polydimethylsiloxane was found to be sensitive to pressure as well as temperature, whereas the Fabry-Perot interferometer filled with a thin layer of ultraviolet glue was sensitive to pressure only. Owing to the different features of two Fabry-Perot interferometers, the sensor achieved simultaneous measurement of pressure and temperature. Combined with Vernier effect, the sensor provided a pressure sensitivity of −36.93 nm/MPa and a temperature sensitivity of 10.29 nm/°C, respectively. The sensor has exhibited potential applications in fields of medical diagnostics, environmental monitoring, and biological sensing.
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