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Investigation of surface integrity and material removal mechanism of single-crystal Si subjected to micro-laser-assisted machining

Materials ScienceAdvanced Laser ProcessingEngineeringMaterial ProcessingMicrofabricationLaser Micro-processingMaterial MachiningMechanical EngineeringMaterial Removal MechanismSingle-crystal SiLaser Processing TechnologyLaser-assisted DepositionMicroelectronicsMicrostructureMicro-laser-assisted Machining