Smoothing surface roughness using Al2O3 atomic layer deposition - Concepedia

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Smoothing surface roughness using Al2O3 atomic layer deposition

51

Citations

30

References

2021

Year

Tyler J. Myers, James A. Throckmorton, Rebecca A. Borrelli, Malcolm N. O’Sullivan, T. K. Hatwar, Steven M. George

Applied Surface Science

Materials EngineeringMaterials ScienceEngineeringSurface RoughnessSurface ScienceApplied PhysicsSurface EngineeringSurface Processing

References

	Year	Citations

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