A Pmut Integrated Microfluidic System for Volumetric Flow Rate Sensing

Abstract

We exhibit the design and fabrication of a linear array of single-celled dual-electrode piezoelectric micromachined ultrasound transducers (PMUTs) and integrate them with a microfluidic channel. The integrated device forms an independent platform to sense the resonant peak shift in a reasonably low volume of fluids. We subsequently pitch on a novel technique of volumetric flow rate sensing based on resonant frequency shift, thereby demonstrating the PMUT-microfluidic integrated device's potentiality as a volumetric flow rate sensor. The sensitivity of the device to volume flow rate sensing is reported to be <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$537\ \text{ms}/\mu \mathrm{l}/\text{hr}$</tex> .