Materials Science in Semiconductor Processing · 2021 · 25 citations · 45 references
EngineeringMaterials EngineeringMaterials ScienceComputational MechanicsMaterials ProcessingVibrationCnc MachiningMachine VibrationMachiningMode ShapesSilicon MaterialsCutting DynamicsMachining DynamicsMaterial Removal EffectsMaterial Removal ModelingNumerical ModellingSilicon MicrostructuresSingle-crystal SiliconWorkpiece Material Removal
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Study on Elliptical Vibration Cutting
Eiji Shamoto, Toshimichi MORIWAKI · CIRP Annals · 1994 · 450 citations
Engineering, Manufacturing Engineering, Mechanical Engineering +12