Publication | Closed Access
Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing
23
Citations
10
References
2021
Year
Materials ScienceChemical EngineeringEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringAbrasive ProcessSurface TreatmentMechanical AbrasionSurface ProcessingAbrasive MachiningMicrostructure
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