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Ultrafast high-temperature sintering of silicon nitride: A comparison with the state-of-the-art techniques

Materials ScienceMaterials EngineeringSinteringPowder MetallurgyState-of-the-art TechniquesEngineeringApplied PhysicsSemiconductor Device FabricationHigh-temperature SinteringSilicon On InsulatorMicrostructureSilicon Nitride