Fabrication and function examination of PZT-based MEMS accelerometers - Concepedia

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Fabrication and function examination of PZT-based MEMS accelerometers

26

Citations

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References

2021

Year

Yi‐Chia Lee, Cheng‐Che Tsai, Cheng-Ying Li, Yu-Cheng Liou, Cheng-Shong Hong, Sheng‐Yuan Chu

Ceramics International

Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringAccelerometerInclinometerInstrumentationPzt-based Mems AccelerometersMicro-electromechanical System

References

	Year	Citations

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