Publication | Closed Access
PE-ALD of Ge<sub>1−x</sub>S<sub>x</sub>amorphous chalcogenide alloys for OTS applications
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Citations
35
References
2021
Year
Materials EngineeringMaterials ScienceOts ApplicationsNon-volatile MemoryEngineeringTransition Metal ChalcogenidesNew ChangesNanoelectronicsApplied PhysicsComputer ArchitectureComputer EngineeringMemory HierarchySemiconductor MaterialSemiconductor MemoryMicroelectronicsPhase Change Memory
Three-dimensional (3D) cross-point (X-point) technology, including amorphous chalcogenide-based ovonic threshold switching (OTS) selectors, is bringing new changes to the memory hierarchy for high-performance computing systems.
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