Publication | Closed Access
Origination and evolution of point defects in AlN film annealed at high temperature
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Citations
40
References
2021
Year
Materials ScienceMaterials EngineeringAln FilmMaterial AnalysisPoint DefectsEngineeringPhysicsAluminium NitrideSurface ScienceApplied PhysicsCondensed Matter PhysicsDefect FormationDefect ToleranceHigh TemperatureThin Film Processing
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