Publication | Closed Access
Large-size free-standing single-crystal β-Ga<sub>2</sub>O<sub>3</sub> membranes fabricated by hydrogen implantation and lift-off
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Citations
38
References
2021
Year
This paper reports the first successful demonstration of large-size free-standing single-crystal β-Ga<sub>2</sub>O<sub>3</sub> NMs fabricated by the hydrogen implantation and lift-off process directly from MOCVD grown β-Ga<sub>2</sub>O<sub>3</sub> epifilms on native substrates.
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