Innovative Smart Cut™ Piezo On Insulator (POI) Substrates for 5G acoustic filters

E. Butaud, S. Ballandras, Marie Bousquet, A. Drouin, B. Tavel, Isabelle Huyet, Alexandre Clairet, Isabelle Bertrand, Aymen Ghorbel, Alexandre Reinhardt

2020 · 62 citations · 8 references

Concepts

Abstract

5G standards implementation drive significant challenges at the acoustic filter level and requires innovative solutions. A promising approach relies in Surface Acoustic Waves technology combined with a thin LiTaO3 piezoelectric crystal layer bonded on Silicon substrate - so called POI-substrate, but suffers from volume manufacturing solution. We will report how Smart Cut™ layer transfer technology enables it.

References

8