2020 · 62 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceAcousticsMicroelectronicsSemiconductor DevicesAcoustic MaterialsPiezoelectric CeramicsPiezoelectric MaterialsAcoustic FiltersAcoustic Wave FiltersFiltersPiezoelectric Thin FilmsSurface Acoustic Wave FiltersSurface Acoustic WavesSurface WavesThin-film Piezoelectrics
5G standards implementation drive significant challenges at the acoustic filter level and requires innovative solutions. A promising approach relies in Surface Acoustic Waves technology combined with a thin LiTaO3 piezoelectric crystal layer bonded on Silicon substrate - so called POI-substrate, but suffers from volume manufacturing solution. We will report how Smart Cut™ layer transfer technology enables it.
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Single-mode high frequency LiNbO<sub>3</sub>Film Bulk Acoustic Resonator
Marie Bousquet, Grégory Enyedi, J. Dechamp et al. · 2019 · 47 citations
Natural Sciences, Materials Engineering, Materials Science +13