Progress in semiconductor diamond photodetectors and MEMS sensors

Abstract

Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MEMS). The wide-bandgap energy of diamond offers the intrinsic advantage for solar-blind detection of DUV light. The recent progress in high-quality single-crystal diamond growth, doping, and devices design have led to the development of solar-blind DUV detectors satisfying the requirement of high Sensitivity, high Signal-to-Noise ratio, high spectral Selectivity, high Speed, and high Stability. On the other hand, the outstanding mechanical hardness, chemical inertness, and intrinsic low mechanical loss of diamond enable the development of MEMS sensors with boosted sensitivity and robustness. The micromachining technologies for diamond developed in these years have opened the avenue for the fabrication of high-quality single-crystal diamond mechanical resonators. In this review, we report on the recent progress in diamond DUV detectors and MEMS sensors, which includes the device principles, design, fabrication, micromachining of diamond, and devices physics. The potential applications of these sensors and a perspective are also described.