A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing

Gyuweon Jung, Yoonki Hong, Seongbin Hong, Dongkyu Jang, Yujeong Jeong, Wonjun Shin, Jinwoo Park, Donghee Kim, Chan Bae Jeong, Dong Uk Kim,

Sensors and Actuators B Chemical · 2021 · 61 citations · 42 references

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