Publication | Closed Access
A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
59
Citations
42
References
2021
Year
Fet TransducerElectrical EngineeringEnergy HarvestingEngineeringSensorsMicrofabricationGas SensorGas Sensor PlatformSensor DesignInstrumentationThermal SensorMicroelectronicsSensor TechnologyElectrochemical Gas Sensor
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