Static and dynamic actuations of clamped-clamped V-shaped micro-resonators under electrostatic forces - Concepedia

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Static and dynamic actuations of clamped-clamped V-shaped micro-resonators under electrostatic forces

DOI Full Paper Access

15

Citations

38

References

2021

Year

Nouha Alcheikh, Hassen M. Ouakad, Sofiane Ben Mbarek, Mohammad I. Younis

Mechanical Systems and Signal Processing

EngineeringClamped-clamped V-shaped Micro-resonatorsElectrostatic ForcesMicrofabricationMechanical EngineeringNano Electro Mechanical SystemDynamic ActuationsMicroactuatorMicro-electromechanical System

References

	Year	Citations

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