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Micro-scale contact behavior and its effect on the material removal process during chemical mechanical polishing

Materials ScienceChemical EngineeringEngineeringMaterial ProcessingMicrofabricationContact MechanicMechanical EngineeringSurface ScienceMaterial Removal ProcessMicro-scale Contact BehaviorChemical Mechanical PolishingSurface TreatmentSurface PolishingSurface ProcessingMicrostructure