Publication | Closed Access
Monitoring method for femtosecond laser modification of silicon carbide via acoustic emission techniques
34
Citations
29
References
2020
Year
Advanced Laser ProcessingEngineeringOptical DiagnosticsSpectroscopyFemtosecond Laser ModificationApplied PhysicsLaser-induced BreakdownSilicon CarbideLaser Processing TechnologyAcoustic Emission TechniquesLaser UltrasoundHigh-power LasersCarbide
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