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Improving optical and electrical performances of aluminum-doped zinc oxide thin films with laser-etched grating structures

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringOptical PropertiesLaser-etched Grating StructuresOxide ElectronicsApplied PhysicsAluminum-doped ZincOptical CeramicThin FilmsPulsed Laser DepositionOptoelectronicsThin Film Processing