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Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam

Materials ScienceEngineeringElectron-beam LithographyMicrofabricationOptical PropertiesApplied PhysicsSapphire SheetsStealth DicingFemtosecond Bessel Beam3D PrintingMicrostructure