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Effects of processing parameters on processing performances of ultrasonic vibration-assisted micro-EDM

EngineeringPower UltrasoundMicrofabricationMechanical EngineeringUltrasonic Vibration-assisted Micro-edmMechanical SystemsAcoustic TweezerUltrasoundVibration ControlMicro-electromechanical SystemMicromachined Ultrasonic Transducer