Optics Express · 2020 · 42 citations · 19 references
EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsPhotonicsThin FilmsIntegrated PhotonicsOptical Thin FilmsOptical WaveguidesOptoelectronic MaterialsPhotonic Integrated CircuitsPhotonic MaterialsActive Photonic ComponentsDevice FabricationGrating CouplersLift-offLithium NiobateMetal Thin FilmsWaveguide CouplingWaveguide Fabrication
Thin-film lithium niobate (LN) has been proved to be an excellent platform for building compact active and nonlinear photonic components on a chip. The coupling of a sub-micron sized LN waveguide and a single-mode fiber remains as one challenging issue. An efficient grating coupler made of Au stripes on an LN ridge waveguide is demonstrated here. The fabrication of the grating is convenient, using just a standard lift-off process of metal films. The peak coupling efficiency of an optimized structure reaches 50.4%, i.e., -3 dB coupling loss, at 1.55 µm wavelength for the fundamental transverse-electrical mode, where the 1-dB coupling bandwidth is 58 nm. Experimentally, fabricated devices, with buried oxide layer thicknesses slightly off the optimal values, exhibit coupling efficiencies of 43.8% and 33.7% for 400 nm and 600 nm thick LN layers.
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Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages
Cheng Wang, Mian Zhang, Xi Chen et al. · Nature · 2018 · 2.5K citations
Monolithic ultra-high-Q lithium niobate microring resonator