Gray-box modeling of 300 mm diameter Czochralski single-crystal Si production process

A family of embedded Runge-Kutta formulae

John R. Dormand, P.J. Prince · Journal of Computational and Applied Mathematics · 1980 · 3.6K citations

Computing, Computer Science, Mathematics +8

Finite-element methods for analysis of the dynamics and control of Czochralski crystal growth

Jeffrey J. Derby, L. J. Atherton, Paul D. Thomas et al. · Journal of Scientific Computing · 1987 · 65 citations

Natural Sciences, Computational Engineering, Finite Element Analysis +13

Nonlinear model-based control of the Czochralski process I: Motivation, modeling and feedback controller design

Jan Winkler, M. Neubert, Joachim Rudolph · Journal of Crystal Growth · 2010 · 62 citations

Engineering, Systems Engineering, Process Control +14

Dynamics and control of the Czochralski process

Michael Gevelber, George Stephanopoulos · Journal of Crystal Growth · 1987 · 57 citations

Natural Sciences, Mathematics, Physics +11

A first-principle model of 300 mm Czochralski single-crystal Si production process for predicting crystal radius and crystal growth rate

Zhongchao Zheng, Tatsuru Seto, Sanghong Kim et al. · Journal of Crystal Growth · 2018 · 38 citations

Natural Sciences, Manufacturing Engineering, Materials Science +14