Publication | Closed Access
Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution<i>via</i>IC-compatible<i>in situ</i>fabrication for on-chip energy storage
19
Citations
57
References
2020
Year
On-chip MscsEngineeringNanodevicesUltrahigh Spatial ResolutionSilicon-nanoforest-based Solvent-free Micro-supercapacitorsExcellent Electrochemical PerformanceChemistryChemical EngineeringNanoscale ChemistryEnergy Storage DeviceNanostructure SynthesisNanoscale ScienceMaterials ScienceNanoscale SystemNanotechnologyNanomanufacturingEnergy StorageSupercapacitorNanostructuringSupercapacitorsNanomaterialsThree-dimensional Heterogeneous IntegrationApplied PhysicsOn-chip Energy StorageNanofabricationNanostructures
Through an IC-compatible<italic>in situ</italic>approach, 3D silicon/nickel nanoforest based on-chip MSCs achieved ultrahigh spatial resolution and excellent electrochemical performance.
| Year | Citations | |
|---|---|---|
Page 1
Page 1