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Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations

Materials ScienceDiamond-like CarbonChemical EngineeringEngineeringNanomaterialsNanotechnologyPlasma CvdApplied PhysicsDiamond FilmsVaried Ch4-h2 MixturesChemical Vapor DepositionNanocrystalline MaterialPlasma Processing