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Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing

Materials ScienceMagnetismElectrical EngineeringMaterials EngineeringEngineeringDetailed AnalysisOxide ElectronicsApplied PhysicsGallium OxideRf Magnetron SputteringChemical DepositionMicroelectronicsDeposition PressureThin Film Processing