Materials Science in Semiconductor Processing · 2020 · 62 citations · 45 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyPhysical ChemistryMaterial ModelingMolecular DynamicsMolecular MechanicsMolecular VibrationNanomechanical PropertiesNanomechanicsGallium NitrideGallium Nitride (Gan) MaterialsMolecular Dynamics CouplingMolecular Vibrational DynamicsNanotribology
45