Concepedia

Publication | Open Access

Low power AlGaN/GaN MEMS pressure sensor for high vacuum application

DOIFull Paper Access

17

Citations

40

References

2020

Year

Jianwen Sun, Dong Hu, Zewen Liu, Luke M. Middelburg, Sten Vollebregt, P.M. Sarro, Guoqi Zhang
Sensors and Actuators A Physical

References

YearCitations

Page 1