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Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture

Process IntensificationChemical EngineeringWafer Scale ProcessingEngineeringPhotochemistryMicrofabricationEnvironmental EngineeringIntegrated CircuitsUv-c IrradiationPhotodegradationOptoelectronics