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A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application

Materials ScienceEngineeringMicrofabricationNanoelectronicsSilicon DiaphragmMechanical EngineeringRod BeamsNano Electro Mechanical SystemMicroelectromechanical SystemsGrapheneSensor DesignMicro-electromechanical System