Design and realization of dumbbell-shaped ciliary MEMS vector hydrophone - Concepedia

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Design and realization of dumbbell-shaped ciliary MEMS vector hydrophone

18

Citations

14

References

2020

Year

Songxiang Ji, Lansheng Zhang, Wendong Zhang, Guojun Zhang, Renxin Wang, Jinlong Song, Xiaoyong Zhang, Yuqi Lian, Zhenzhen Shang

Sensors and Actuators A Physical

EngineeringMicrofabricationMechatronicsMicrofluidicsMicro-electromechanical System

References

	Year	Citations

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