Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range

Bo Sha, Anatolii Lukianov, Mykhailo Dusheіko, V.B. Lozinskii, Andriy N. Klyui, D. V. Korbutyak, S. E. Pritchin, NickolaiI. Klyui

Optical Materials · 2020 · 21 citations · 28 references

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